Localised solid-state nanopore fabrication via controlled breakdown using on-chip electrodes

Abstract Controlled breakdown has recently emerged as a highly accessible technique to fabricate solid-state nanopores. However, in its most common form, controlled creates single nanopore at an arbitrary location the membrane. Here, we introduce new strategy whereby is performed by applying electric field between on-chip electrode and electrolyte solution contact with opposite side of We demonstrate two advantages this method. First, can independently multiple nanopores given positions membrane localising applied electrode. Second, create that are self-aligned complementary nanoelectrodes voltages electrodes locally heat during breakdown. This method provides path towards affordable, rapid, automatable fabrication arrays nanostructures.